Advanced Microfabrication Facility (AMF)
Advanced Microfabrication Facility
Engineering 1, Rooms 124 & 163
Orlando, FL 32816
Phone: 407-882-1500 or 407-823-3584 or 407-823-4517
The Advanced Microfabrication Facility (AMF) is a multi-user cleanroom facility dedicated to providing university researchers and industrial and government partners the capabilities to perform cutting edge research, and training and education of students in the use of the available equipment for fabrication and testing of microdevices. AMF consists of a 600 sq. ft. class 100 facility and a 2,500 sq. ft. class 1000 facility.
The AMF is supported by a research associate, a graduate student assistant, and a facilities coordinator to assist all users in the use of and training on the AMF equipment. Collaboration of UCF researchers with other universities, government agencies, and industrial companies is strongly encouraged.
Available Equipment/Techniques
Lithographic Processing
- Pattern Generator
- EVG 620 Dual sided mask aligner
- AutoGlow Plasma Asher
- LFE Barrel Asher
- Nanonex NEX2500 Nano-Imprinter
- Quintel Mask Aligner
- Tamarak Contact Printer
- MJB -3 Mask Aligners
Thin Film Processing
- AJA Six-Gun Sputtering System
- AJA Three-Gun Sputtering System
- AJA 2-Gun, 10 Pocket E-Beam System with Ion-Assist Source
- CHA E-Beam Evaporation
- EVG 510 Wafer Bonder
- Plasma Technology - RIE
- Edwards Filament Evaporator
- Cryo Filament Evaporation
- Cryo Small Single Sputtering
Characterization
- J.A. Woollam Spectral Ellipsometer
- Rudolph Ellipsometer
- Signatone 8" Four Point Probe
- Magnetron Four Point Probe
- Keithley CF System
- HP 4145B Transistor Analyzer
- HP 4192LF Impedance Analyzer
- DC Probe Station
- Tektronix Curve Tracers
- VEECO-Interferometric Profiler
- Alpha Step Profilometer
- Nikon Measurement Microscope
- Nikon Inspection Microscope
- Micro-Positioner
- Micropositioner - 6 Axis
General Lab Equipment
- Mini-Brute 4" Phosphorus and Boron Diffusion furnaces
- Exhaust hoods, wet processing benches, including RCA-1 & 2 cleans, TMAH silicon etch, and chemical metal etching.
- Isotemp Programmable Furnace
- Mini-Brute 4" wet and dry silicon oxidation furnaces
How to Use the Facility
- All work performed at AMF requires a work order form
- UCF users will need to submit a completed work order form signed by their advisor.
- Other University or industry or government users will need to provide a Purchase Order made to UCF/AMPAC
- Completed work order forms and Purchase Orders may be submitted via email to Karen.Glidewell@ucf.edu, or faxed to (407) 882-1502
Contact
| Dr. Kevin Coffey Professor (407) 823-2175 Kevin.Coffey@ucf.edu |
Mr. Ed Dein Research Associate (407) 823-3584 Edward.Dein@ucf.edu |
Ms. Karen Glidewell Facility Coordinator (407) 882-1500 Karen.Glidewell@ucf.edu |
Please Acknowledge Us
Any publications or presentations resulting from data obtained or samples prepared by the AMF engineer/faculty should acknowledge the assistance of the engineer/faculty member and/or center as:
"Advanced Microfabrication Facility
AMPAC
University of Central Florida"
Please provide a reprint of any publication in which the AMF and its faculty, research associate, or students are acknowledged.
Thank You.
